JPS6421309U - - Google Patents

Info

Publication number
JPS6421309U
JPS6421309U JP14315787U JP14315787U JPS6421309U JP S6421309 U JPS6421309 U JP S6421309U JP 14315787 U JP14315787 U JP 14315787U JP 14315787 U JP14315787 U JP 14315787U JP S6421309 U JPS6421309 U JP S6421309U
Authority
JP
Japan
Prior art keywords
conductor
plate
film
dielectric
grounding conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14315787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0611463Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14315787U priority Critical patent/JPH0611463Y2/ja
Publication of JPS6421309U publication Critical patent/JPS6421309U/ja
Application granted granted Critical
Publication of JPH0611463Y2 publication Critical patent/JPH0611463Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Measuring Leads Or Probes (AREA)
JP14315787U 1987-02-06 1987-09-21 高周波プローブ Expired - Lifetime JPH0611463Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14315787U JPH0611463Y2 (ja) 1987-02-06 1987-09-21 高周波プローブ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1549387 1987-02-06
JP62-15493 1987-02-06
JP14315787U JPH0611463Y2 (ja) 1987-02-06 1987-09-21 高周波プローブ

Publications (2)

Publication Number Publication Date
JPS6421309U true JPS6421309U (en]) 1989-02-02
JPH0611463Y2 JPH0611463Y2 (ja) 1994-03-23

Family

ID=31717316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14315787U Expired - Lifetime JPH0611463Y2 (ja) 1987-02-06 1987-09-21 高周波プローブ

Country Status (1)

Country Link
JP (1) JPH0611463Y2 (en])

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007123185A1 (ja) * 2006-04-21 2007-11-01 National Institute Of Advanced Industrial Science And Technology コンタクトプローブ、及びその作製方法
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals
US7417446B2 (en) 2002-11-13 2008-08-26 Cascade Microtech, Inc. Probe for combined signals
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7427868B2 (en) 2003-12-24 2008-09-23 Cascade Microtech, Inc. Active wafer probe
US7436194B2 (en) 2002-05-23 2008-10-14 Cascade Microtech, Inc. Shielded probe with low contact resistance for testing a device under test
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7456646B2 (en) 2000-12-04 2008-11-25 Cascade Microtech, Inc. Wafer probe
US7498829B2 (en) 2003-05-23 2009-03-03 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7504842B2 (en) 1997-05-28 2009-03-17 Cascade Microtech, Inc. Probe holder for testing of a test device
US7456646B2 (en) 2000-12-04 2008-11-25 Cascade Microtech, Inc. Wafer probe
US7482823B2 (en) 2002-05-23 2009-01-27 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7518387B2 (en) 2002-05-23 2009-04-14 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7489149B2 (en) 2002-05-23 2009-02-10 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7436194B2 (en) 2002-05-23 2008-10-14 Cascade Microtech, Inc. Shielded probe with low contact resistance for testing a device under test
US7453276B2 (en) 2002-11-13 2008-11-18 Cascade Microtech, Inc. Probe for combined signals
US7417446B2 (en) 2002-11-13 2008-08-26 Cascade Microtech, Inc. Probe for combined signals
US7498829B2 (en) 2003-05-23 2009-03-03 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7501842B2 (en) 2003-05-23 2009-03-10 Cascade Microtech, Inc. Shielded probe for testing a device under test
US7427868B2 (en) 2003-12-24 2008-09-23 Cascade Microtech, Inc. Active wafer probe
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures
US7449899B2 (en) 2005-06-08 2008-11-11 Cascade Microtech, Inc. Probe for high frequency signals
US7619419B2 (en) 2005-06-13 2009-11-17 Cascade Microtech, Inc. Wideband active-passive differential signal probe
WO2007123185A1 (ja) * 2006-04-21 2007-11-01 National Institute Of Advanced Industrial Science And Technology コンタクトプローブ、及びその作製方法
JPWO2007123185A1 (ja) * 2006-04-21 2009-09-03 独立行政法人産業技術総合研究所 コンタクトプローブ、及びその作製方法
US9134346B2 (en) 2006-04-21 2015-09-15 National Institute Of Advanced Industrial Science And Technology Method of making contact probe
US7609077B2 (en) 2006-06-09 2009-10-27 Cascade Microtech, Inc. Differential signal probe with integral balun
US7443186B2 (en) 2006-06-12 2008-10-28 Cascade Microtech, Inc. On-wafer test structures for differential signals
US7403028B2 (en) 2006-06-12 2008-07-22 Cascade Microtech, Inc. Test structure and probe for differential signals

Also Published As

Publication number Publication date
JPH0611463Y2 (ja) 1994-03-23

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